CoLiSA.MMP Highlights

Joint DSA Workshop of CoLiSA and PLACYD projects#

This joint workshop of the CoLiSA and PLACYD projects on October 14, 2016 in Grenoble will highlight the results of EU-funded research and development activities on the application of directed self-assembly (DSA) or future manufacturing of integrated circuits. The workshop is hold in connection to the 2nd DSA symposium and is open for everyone.

Date: October 14th, 2016 (after DSA symposium)
Location: Grenoble, World Trade Center Grenoble

Agenda:

time Topic Speaker
8:45 – 9:00 Welcome  
9:00 – 9:20 Overview on the PLACYD and CoLiSA projects Ian Cayrefourcq (Arkema) and Andreas Erdmann (Fraunhofer IISB)
9:20 – 9:50 PLACYD and CoLiSA materials (specificity in synthesis, in formulation, in quality, reproducibility) Christophe Navarro (Arkema)
9:50 – 10:20 Computational modeling of DSA on different scales Marcus Müller (Georg-August-Univ. Göttingen)
10:20 – 10:50 Integrated computation platform for the lithography/DSA co-process Tim Fühner (Fraunhofer IISB)
10:50 – 11:15 Break  
11:15 – 11:45 Metrology (present methodologies, inline/offline, status and challenges) Ilan Englard (Applied Materials, Israel)
11:45 – 12:15 Process integration (present integration schemes and performances) Raluca Tiron (CEA-LETI)
12:15 "Buffet de l'amitié"