Joint DSA Workshop of CoLiSA and PLACYD projects
This joint workshop of the CoLiSA and PLACYD projects on October 14, 2016 in Grenoble will highlight the results of EU-funded research and development activities on the application of directed self-assembly (DSA) or future manufacturing of integrated circuits. The workshop is hold in connection to the 2nd DSA symposium and is open for everyone.
Date: October 14th, 2016 (after DSA symposium)
Location: Grenoble, World Trade Center Grenoble
Agenda:
time | Topic | Speaker |
---|---|---|
8:45 – 9:00 | Welcome | |
9:00 – 9:20 | Overview on the PLACYD and CoLiSA projects | Ian Cayrefourcq (Arkema) and Andreas Erdmann (Fraunhofer IISB) |
9:20 – 9:50 | PLACYD and CoLiSA materials (specificity in synthesis, in formulation, in quality, reproducibility) | Christophe Navarro (Arkema) |
9:50 – 10:20 | Computational modeling of DSA on different scales | Marcus Müller (Georg-August-Univ. Göttingen) |
10:20 – 10:50 | Integrated computation platform for the lithography/DSA co-process | Tim Fühner (Fraunhofer IISB) |
10:50 – 11:15 | Break | |
11:15 – 11:45 | Metrology (present methodologies, inline/offline, status and challenges) | Ilan Englard (Applied Materials, Israel) |
11:45 – 12:15 | Process integration (present integration schemes and performances) | Raluca Tiron (CEA-LETI) |
12:15 | "Buffet de l'amitié" |