Fraunhofer Institute for Integrated Systems and Device TechnologyJoint DSA Workshop of CoLiSA and PLACYD projects
This joint workshop of the CoLiSA and PLACYD projects on October 14, 2016 in Grenoble will highlight the results of EU-funded research and development activities on the application of directed self-assembly (DSA) or future manufacturing of integrated circuits. The workshop is hold in connection to the 2nd DSA symposium and is open for everyone.
Date: October 14th, 2016 (after DSA symposium)
Location: Grenoble, World Trade Center Grenoble
Agenda:
| time | Topic | Speaker |
|---|---|---|
| 8:45 – 9:00 | Welcome | |
| 9:00 – 9:20 | Overview on the PLACYD and CoLiSA projects | Ian Cayrefourcq (Arkema) and Andreas Erdmann (Fraunhofer IISB) |
| 9:20 – 9:50 | PLACYD and CoLiSA materials (specificity in synthesis, in formulation, in quality, reproducibility) | Christophe Navarro (Arkema) |
| 9:50 – 10:20 | Computational modeling of DSA on different scales | Marcus Müller (Georg-August-Univ. Göttingen) |
| 10:20 – 10:50 | Integrated computation platform for the lithography/DSA co-process | Tim Fühner (Fraunhofer IISB) |
| 10:50 – 11:15 | Break | |
| 11:15 – 11:45 | Metrology (present methodologies, inline/offline, status and challenges) | Ilan Englard (Applied Materials, Israel) |
| 11:45 – 12:15 | Process integration (present integration schemes and performances) | Raluca Tiron (CEA-LETI) |
| 12:15 | "Buffet de l'amitié" |