Fraunhofer Institute for Integrated Systems and Device TechnologyLithography Simulator Dr.LiTHO
Dr.LiTHO is a comprehensive simulation environment for photolithography, developed at the Fraunhofer IISB. Its main focus is on development and research applications.
Dr.LiTHO is a comprehensive simulation environment for photolithography, developed at the Fraunhofer IISB. Its main focus is on development and research applications.