Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Institute Computational Lithography and Optics Group
Agencia Estadal Consejo Superior de Investigaciones Científicas (CSIC) Spanish National Research Council (CSIC) National Microelectronics Center
Commissariat à l’Energie Atomique et aux Energies Alternatives (LETI) Research Organisation Institute
National Technical University of Athens (NTUA) University Computational Materials Science and Engineering Group
Georg-August-Universität, Göttingen, Stiftung Öffentlichen Rechts University Soft Matter and Biophysics Research Group
Fraunhofer Institute for Integrated Systems and Device Technology